Functions

Reticle cleaner can clean the reticle glass-side/pellicle-side/edge-side to prevent HAZE issues, particles and contamination. This reticle cleaner solution is beneficial for reducing the reticle cleaning and recertification cycle time.

• Glass-side/Edge side: Cleaning by DI water and the dust-free cloth
• Pellicle-side: Cleaning by needle air-knife
• Edge side
• RSP150/RSP200/EUV POD and shipping BOX exchange functions available
• SECS/GEM and E84 OHT functions available
• SECS/GEM 200/300
• Equipment Certification: SEMI S2 & Seismic Certification

Reticle Size

520 x 800mm Reticle (Customized size development available)

Glass-side Cleaning

• Linear motion cleaning with DI water and dust-free cloth integration.
• During the cleaning process, the reticle is oriented with the pellicle side facing up, securely held by clamps with anti-static rubber strips to prevent any impact on the pellicle surface from DI water cleaning

Functions

Automated equipment for exchanging reticles between different carriers

• POD loadport for OHT transfer
• Reticle rotation and visual inspection functions available
• CCD reticle barcode reading
• Barcode printing function available
• Automatic detection of reticle box type (plastic or metal,) box orientation, and front-side and back-side detection
• SECS/GEM and E84 OHT functions available
• SECS/GEM 200/300
• Equipment Certification: SEMI S2 & Seismic Certification

Functions

• Standalone type
• Purge stocker can be customized with different reticle carriers (RSP 150, RSP 200, EUV POD) and footprint
• Storage management system which can support for RFID and SECS/GEM integration
• Continuous purge functions available
• Purge flow rate monitor

Functions

• Standalone type
• Purge stocker can be customized with different reticle carriers (RSP 150, RSP 200, EUV POD) and footprint
• Continuous purge with intelligent flow control functions available
• Purge flow rate monitor